MEMS Pressure Sensor Backside Etch

Description

This animation, created by Southwest Center for Microsystems Education (SCME), " illustrates the anisotropic etch on the backside of a silicon wafer. The chamber formed as a result of this etch is used as the reference chamber for a micro-pressure sensor." Viewers can find supporting Learning Modules and activities from the SCME website under Educational Materials.

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NSDL Science -- Technology Engineering Technology Bio and Chemical Technologies -- Biotechnology Science -- Engineering
#NSDL #Science--Technology #Engineering #Technology #BioandChemicalTechnologies--Biotechnology #Science--Engineering

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